Environmental and health risk analysis of nitrogen trifluoride (NF3), a toxic and potent greenhouse gas
This article aimed at the introduction of nitrogen trifluoride (NF3) and its decomposition products into its hazards to the environment and health because this perfluorocompound is a toxic and potent greenhouse gas not blanketed into the Kyoto Protocol. This paper also predicted the global NF3 emissions from the electronics industry on the basis of the methodologies recommended by the Intergovernmental Panel on Climate Change (IPCC), and further discussed its atmospheric implications according to the estimation of environmental fate for NF3. It showed that the vaporization of NF3 from the water bodies to the atmosphere is very high according to its predicted value (ca. 6.0